Xanadu and ASML have announced a collaboration to develop advanced lithography processes for Xanadu’s photonic quantum hardware. The partnership aims to gain deeper insight into how advanced lithography innovations can reduce optical losses in quantum computing chips, accelerating the industry’s path toward utility-scale quantum computing, Xanadu said in a press release. For storage and semiconductor readers, this marks a notable expansion of ASML’s lithography expertise beyond traditional silicon logic and memory into the domain of photonic quantum computing.

Weedbrook and Baron on fault tolerance

Dr. Christian Weedbrook, Founder and CEO of Xanadu, stated that fault tolerance and error correction are the most important technical objectives for the quantum computing industry. He noted that collaborating with ASML provides the opportunity to explore advanced, industry-leading lithography processes that support the continued development of their photonic quantum hardware. Stan Baron, Senior Vice President and Head of Customer Team EU-US at ASML, described the collaboration as an opportunity to better understand how ASML’s technology and expertise can support next-generation photonics applications as the technology matures.

Optical loss as a fault-tolerance barrier

The significance of this partnership lies in the application of high-precision lithography to photonic quantum computing, a field where optical loss is a primary barrier to fault tolerance. Unlike traditional CMOS logic, photonic quantum hardware relies on the precise manipulation of light, where even minor deviations in waveguide geometry or coupling interfaces can lead to significant signal loss. By leveraging ASML’s advanced lithography processes, Xanadu aims to improve patterning control, which directly impacts the efficiency and reliability of photonic structures.

ASML’s lithography beyond silicon logic

This move extends ASML’s lithography expertise beyond traditional silicon logic and memory into the domain of photonic quantum computing. While ASML is widely known for its Extreme Ultraviolet (EUV) and Deep Ultraviolet (DUV) systems used in high-volume semiconductor manufacturing, this partnership signals an exploration of how these precision patterning capabilities can address the specific optical loss challenges inherent in photonic quantum chips. The collaboration focuses on manufacturing approaches for photonic hardware rather than standard transistor scaling.

Intel’s 1 million High-NA EUV wafers

The broader context of ASML’s lithography efforts is evident in its High-NA EUV program, where Intel has processed more than one million 300mm wafers on ASML’s High-NA EUV scanners, including tool certification, R&D, and production combined. ASML’s total figure of 1.35 million High-NA wafers made to date puts Intel at roughly three-quarters of the world total to-date. This underscores the scale of ASML’s lithography capabilities and the industry’s focus on advanced patterning for next-generation computing.

Demand for specialized lithography solutions

For equipment planners and advanced packaging suppliers, this indicates a growing demand for specialized lithography solutions that can handle the unique requirements of photonic integrated circuits. The collaboration underscores that achieving utility-scale quantum computing requires not just algorithmic breakthroughs but also significant advances in physical manufacturing precision. This is relevant to the broader semiconductor supply chain as it demonstrates the expansion of lithography technology into new application domains beyond standard memory and logic.